Airgap

[microelectronics] Airgap is an invention in microelectronic fabrication by IBM. == Description == By insulating copper wires within a chip with vacuum holes, capacitance can be minimized enabling chips to work faster or draw less power. A vacuum is believed to be the ultimate insulator for what is known as wiring capacitance, which occurs ...
Found on http://en.wikipedia.org/wiki/Airgap_(microelectronics)
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