1) Atomize 2) Break up into small particles 3) Reduce to fine particles 4) Spray 5) Spray very finely 6) Vaporise 1) Atomize 
1) To break down into discrete atoms, usually by the application of extreme heat, as in atomic absorption, 2) To break a liquid into tiny droplets, as occurs in fuel injected engines or in the production of aerosol sprays
To reduce a liquid to fine droplets by passing it under pressure through a suitable nozzle, or by applying drops to a spinning disc.