In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer. The technique forces an oxidizing agent to diffuse into the wafer at high temperature and react with it. The rate of oxide growth is often predicted by the Deal-Grove model. Thermal oxidation may be applied to diffe...
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http://en.wikipedia.org/wiki/Thermal_oxidation
(from the article `integrated circuit`) Two more chemical methods of deposition are electrodeposition (or electroplating) and thermal oxidation. In the former the substrate is given an ...
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http://www.britannica.com/eb/a-z/t/37
high temperature incineration of pollutants such as VOCs and odours in gas streams
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http://www.oasisenviro.co.uk/Glossary%20S%20to%20W.htm
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